Facilities

LTCC Fabrication
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LTCC equipments
LTCC printer: P200S
Manufacturer: KEKO
      LTCC Perforator: PAM4s
Manufacturer: KEKO
 
Cutting and ablation:
Protolaser U3
Manufacturer: LPKF
      Cutting machine: CM-15A
Manufacturer: KEKO
 
Automatic stacker: IS4PL
Manufacturer: KEKO
      Isostatic press: ILS66S
Manufacturer: KEKO
 
Cofiring oven: PEO603
Manufacturer: ATV
         

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MEMS Fabrication
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MEMS equipments
Plasma deposition: SPT-330H
Manufacturer: Plasmionique
      Mask aligner: 800MBA
Manufacturer: OAI
 
Wet bench with DI water generator
Manufacturer: STC
      Resin deposition: WS-400BZ-6NPP/LITE
Manufacturer: Laurell
 
Direct exposition system: SF100
Manufacturer: Intelligent Micro patterning
      IBE-RIE: Nanoquest I
Manufacturer: Intelvac
 
CMP: RBPo-6
Manufacturer: Rtec Instruments
         

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